Materials science of thin films : deposition and structure / Milton Ohring.

Format:

Book

Author/Creator:

Ohring, Milton, 1936-

Language:

English

Subjects (All):

Thin films.

Physical Description:

1 online resource (817 p.)

Edition:

2nd ed.

Place of Publication:

San Diego, CA : Academic Press, 2002.

Summary:

This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field.Since 1992, when the book was first publi

Contents:

Front Cover; Materials Science of Thin Films: Deposition and Structure; Copyright Page; Contents; Foreword to First Edition; Preface; Acknowledgments; A Historical Perspective; Chapter 1. A Review of Materials Science; 1.1 Introduction; 1.2 Structure; 1.3 Defects in Solids; 1.4. Bonds and Bands in Materials; 1.5. Thermodynamics of Materials; 1.6. Kinetics; 1.7. Nucleation; 1.8. An Introduction to Mechanical Behavior; 1.9. Conclusion; Exercises; References; Chapter 2. Vacuum Science and Technology; 2.1. Introduction; 2.2. Kinetic Theory of Gases; 2.3. Gas Transport and Pumping

2.4. Vacuum Pumps2.5. Vacuum Systems; 2.6. Conclusion; Exercises; References; Chapter 3. Thin-Film Evaporation Processes; 3.1. Introduction; 3.2. The Physics and Chemistry of Evaporation; 3.3. Film Thickness Uniformity and Purity; 3.4. Evaporation Hardware; 3.5. Evaporation Processes and Applications; 3.6. Conclusion; Exercises; References; Chapter 4. Discharges, Plasmas, and Ion-Surface Interactions; 4.1. Introduction; 4.2. Plasmas, Discharges, and Arcs; 4.3. Fundamentals of Plasma Physics; 4.4. Reactions in Plasmas; 4.5. Physics of Sputtering

4.6. Ion Bombardment Modification of Growing Films4.7. Conclusion; Exercises; References; Chapter 5. Plasma and Ion Beam Processing of Thin Films; 5.1. Introduction; 5.2. DC, AC, and Reactive Sputtering Processes; 5.3. Magnetron Sputtering; 5.4. Plasma Etching; 5.5. Hybrid and Modified PVD Processes; 5.6. Conclusion; Exercises; References; Chapter 6. Chemical Vapor Deposition; 6.1. Introduction; 6.2. Reaction Types; 6.3. Thermodynamics of CVD; 6.4. Gas Transport; 6.5. Film Growth Kinetics; 6.6. Thermal CVD Processes; 6.7. Plasma-Enhanced CVD Processes; 6.8. Some CVD Materials Issues

6.9. Safety6.10. Conclusion; Exercises; References; Chapter 7. Substrate Surfaces and Thin-Film Nucleation; 7.1. Introduction; 7.2. An Atomic View of Substrate Surfaces; 7.3. Thermodynamic Aspects of Nucleation; 7.4. Kinetic Processes in Nucleation and Growth; 7.5. Experimental Studies of Nucleation and Growth; 7.6. Conclusion; Exercises; References; Chapter 8. Epitaxy; 8.1. Introduction; 8.2. Manifestations of Epitaxy; 8.3. Lattice Misfit and Defects in Epitaxial Films; 8.4. Epitaxy of Compound Semiconductors; 8.5. High-Temperature Methods for Depositing Epitaxial Semiconductor Films

8.6. Low-Temperature Methods for Depositing Epitaxial Semiconductor Films8.7. Mechanisms and Characterization of Epitaxial Film Growth; 8.8. Conclusion; Exercises; References; Chapter 9. Film Structure; 9.1. Introduction; 9.2. Structural Morphology of Deposited Films and Coatings; 9.3. Computational Simulations of Film Structure; 9.4. Grain Growth, Texture, and Microstructure Control in Thin Films; 9.5. Constrained Film Structures; 9.6. Amorphous Thin Films; 9.7. Conclusion; Exercises; References; Chapter 10. Characterization of Thin Films and Surfaces; 10.1. Introduction

10.2. Film Thickness

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

9786611020033

9781281020031

1281020036

9780080491783

0080491782

OCLC:

437181612