Smart mems and sensor systems / Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro.

Format:

Book

Author/Creator:

Gaura, Elena.

Contributor:

Newman, Robert M.

Language:

English

Subjects (All):

Microelectromechanical systems.

Smart structures.

Physical Description:

1 online resource (539 p. ) ill.

Edition:

1st ed.

Place of Publication:

London : Imperial College Press, c2006.

Language Note:

English

Summary:

MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. This book presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a systems perspective.

Contents:

Preface

ch. 1. Markets and applications. 1.1. Technology at crossroads. 1.2. The present - MEMS in the news. 1.3. The past - great expectations. 1.4. The Future - maturity and pervasive applications. 1.5. Drivers for progress. 1.6. Progress - device improvement. 1.7. Progress - device integration. 1.8. Smart MEMS - the research agenda. 1.9. Structure of the book

ch. 2. Microfabrication technologies. 2.1. Introduction. 2.2. Passive components. 2.3. Sensing components. 2.4. Actuating components. 2.5. Materials and growth. 2.6. Fabrication techniques. 2.7. Conclusions

ch. 3. Sensor electronics. 3.1. Introduction. 3.2. Functions of a sensor system. 3.3. Analogue and digital design options. 3.4. Digital signal processing. 3.5. Interface configurations for different transducer types. 3.6. Integration. 3.7. Design for power awareness. 3.8. Conclusion

ch. 4. Sensor signal enhancement. 4.1. Errors in sensor systems and measurement quality (non-linearity, cross-sensitivity, offset, parameter drift). 4.2. Sensor calibration and compensation - techniques and examples. 4.3. System design choices for compensation - closed loop configurations and other designs. 4.4. Summing up on sensor calibration and compensation

ch. 5. Case study: control systems for capacitive inertial sensors. 5.1. Introduction. 5.2. Open loop accelerometer. 5.3. Closed loop accelerometer. 5.4. Conclusions

ch. 6. Case study: adaptive optics and smart VLSI/MEMS systems. 6.1. Introduction. 6.2. Adaptive optics and MEMS systems. 6.3. Operational principles. 6.4. Device implementation. 6.5. Closed-loop adaptive optical system. 6.6. Conclusions and future trends

ch. 7. Artificial intelligence techniques for microsensors identification and compensation. 7.1. Artificial neural networks: what they are and how they are used for microsensor control and identification. 7.2. Open loop, neural transducer prototype for static/low frequency applications. 7.3. Closed-loop neural network controlled accelerometer. 7.4. The neural network non-linear gain controller. 7.5. Micromachined sensor identification using neural networks. 7.6. Concluding remarks

ch. 8. Smart, intelligent and cogent MEMS based sensors. 8.1. Introduction. 8.2. Smart, intelligent and cogent sensors - what do the terms mean. 8.3. What and where is the added value brought by intelligence? 8.4. ANNs and MEMS. 8.5. AI for MEMS intelligence. 8.6. 'Cogent' sensors - fault detection case study. 8.7. Conclusion

ch. 9. Sensor arrays and networks. 9.1. Potential of sensor arrays. 9.2. Node design. 9.3. An architectural history of sensor arrays and networks. 9.4. Systems design issues. 9.5. Network technology and topology. 9.6. Conclusion

ch. 10. Wireless and Ad hoc sensor networks. 10.1. Sensor network applications. 10.2. System designers' role. 10.3. Design assumptions for Ad hoc networks. 10.4. Distributed system design philosophy. 10.5. Network design considerations. 10.6. Layered model. 10.7. Sensor network operating environments. 10.8. Application services. 10.9. Proposed sensor support system architecture. 10.10. Conclusions

ch. 11. Realising the dream - a case study. 11.1. Introduction. 11.2. The mission. 11.3. Initial rough design. 11.4. Sensor technology. 11.5. Deployment. 11.6. Operation, control and communication. 11.7. Querying the array. 11.8. A cogent sensor. 11.9. A world of applications.

Notes:

Bibliographic Level Mode of Issuance: Monograph

Includes bibliographical references and index.

ISBN:

9786611867393

9781281867391

128186739X

9781601198877

1601198876

9781860949203

1860949207