4 options
MEMS mechanical sensors / Stephen Beeby ... [et al.
- Format:
- Book
- Series:
- Microelectromechanical systems series.
- Artech House microelectromechanical systems (MEMS) series
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Detectors.
- Physical Description:
- 1 online resource (280 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Boston : Artech House, c2004.
- Language Note:
- English
- System Details:
- Mode of access: World Wide Web
- data file
- Summary:
- Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
- Contents:
- Machine generated contents note: Ch. 1 Introduction
- Ch. 2 Materials and fabrication techniques
- Ch. 3 MEMS simulation and design tools
- Ch. 4 Mechanical sensor packaging
- Ch. 5
- Notes:
- Description based upon print version of record.
- Print version record.
- Includes bibliographical references and index.
- ISBN:
- 1-58053-873-8
- OCLC:
- 70733931
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.