1 option
IEEE/SEMI International Semiconductor Manufacturing Science Symposium : [proceedings].
- Format:
- Conference/Event
- Journal/Periodical
- Conference Name:
- IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductor industry--Production control--Congresses.
- Semiconductor industry.
- Semiconductor industry--Management--Congresses.
- Process control--Congresses.
- Process control.
- Semiconductor industry--Management.
- Semiconductor industry--Production control.
- Semiconductors--Design and construction.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource
- Annual
- 1989-1993.
- Other Title:
- IEEE SEMI International Semiconductor Manufacturing Science Symposium
- International Semiconductor Manufacturing Science Symposium
- Proceedings
- ISMSS International Semiconductor Manufacturing Science Symposium
- ISMSS proceedings
- Place of Publication:
- New York, NY : Institute of Electrical and Electronics Engineers, c1989-c1993.
- Notes:
- Some vols. lack numerical designation.
- Other Format:
- Print version: IEEE/SEMI International Semiconductor Manufacturing Science Symposium :
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