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2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference : 16-19 May 2016, Saratoga Springs, New York, USA / Institute of Electrial and Electronics Engineers, Semiconductor Equipment and Materials International.

IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online

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Format:
Book
Conference/Event
Contributor:
Institute of Electrial and Electronics Engineers, sponsoring body.
Semiconductor Equipment and Materials International, sponsoring body.
Conference Name:
Annual SEMI Advanced Semiconductor Manufacturing Conference (27th : 2016 : Saratoga Springs, N.Y.)
Language:
English
Subjects (All):
Semiconductors--Design and construction--Congresses.
Semiconductors.
Semiconductor industry--Congresses.
Semiconductor industry.
Process control--Congresses.
Process control.
Physical Description:
1 online resource (474 pages)
Place of Publication:
Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2016.
Notes:
Description based on: online resource; title from pdf title page (IEEE Xplore, viewed March 13, 2020).
ISBN:
1-5090-0270-7

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