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2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference : 16-19 May 2016, Saratoga Springs, New York, USA / Institute of Electrial and Electronics Engineers, Semiconductor Equipment and Materials International.
- Format:
- Book
- Conference/Event
- Conference Name:
- Annual SEMI Advanced Semiconductor Manufacturing Conference (27th : 2016 : Saratoga Springs, N.Y.)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Process control--Congresses.
- Process control.
- Physical Description:
- 1 online resource (474 pages)
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2016.
- Notes:
- Description based on: online resource; title from pdf title page (IEEE Xplore, viewed March 13, 2020).
- ISBN:
- 1-5090-0270-7
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