2016 29th International Vacuum Nanoelectronics Conference (IVNC) / Institute of Electrical and Electronics Engineers.

Format:

Book

Author/Creator:

Institute of Electrical and Electronics Engineers, author, issuing body.

Language:

English

Subjects (All):

Microelectronics--Congresses.

Microelectronics.

Physical Description:

1 online resource (99 pages) : illustrations

Other Title:

2016 29th International Vacuum Nanoelectronics Conference

Place of Publication:

Piscataway, New Jersey : IEEE, 2016.

Summary:

Recent work on in-plane nanoscale field emission devices operating at atmospheric pressures highlights the promise of these devices for high-frequency applications if challenges in reliability and robustness can be mastered. We demonstrate a novel fabrication technique using silicon on insulator substrates to reliably produce sub-20 nanometer gaps between deposited emitter and collector metals in symmetric two-terminal field emission devices. Our emitters demonstrate repeatable, low voltage emission across a range of metals. By reducing the operating voltages through miniaturization, our devices can operate at atmospheric pressures without deterioration through erosive bombardment from ionized gas atoms. Furthermore, the devices are shown to operate at temperatures as high as of 215C in vacuum atmosphere.

Notes:

Description based on publisher supplied metadata and other sources.

Includes bibliographical references.

ISBN:

9781509024193

1509024190