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2016 International Conference on Microelectronic Test Structures (ICMTS) / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, issuing body, author.
- Language:
- English
- Subjects (All):
- Integrated circuits--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource : illustrations
- Other Title:
- 2016 International Conference on Microelectronic Test Structures
- Place of Publication:
- Piscataway, New Jersey : IEEE, 2016.
- Summary:
- The conference covers new achievements in the design, fabrication and utilization of test structures, which are used in a variety of ways for the measurement and characterization in the field of micro nano electronics and MEMS Process and device characterization, parameter extraction, and yield enhancement are some of the typical applications discussed in the conference.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-4673-8793-2
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