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25th European Mask and Lithography Conference : 12-15 January 2009.
- Format:
- Book
- Conference/Event
- Conference Name:
- European Mask and Lithography Conference (25th : 2009 : Dresden, Germany)
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Integrated circuits--Masks--Congresses.
- Integrated circuits.
- Physical Description:
- 1 online resource (135 pages)
- Place of Publication:
- Frankfurt am Main, Germany : VDE, 2011.
- Notes:
- Description based on: online resource; title from title screen (IEEE Xplore Digital Library, viewed March 21, 2018).
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