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ICPT 2012 : International Conference on Planarization/CMP Technology : 15-17 October 2012.
- Format:
- Book
- Author/Creator:
- Zwicker, Gerfried, author.
- Language:
- English
- Subjects (All):
- Chemical mechanical planarization--Congresses.
- Chemical mechanical planarization.
- Physical Description:
- 1 online resource (169 pages)
- Place of Publication:
- Frankfurt am Main, Germany : VDE, 2012.
- Notes:
- Description based on: online resource; title from title screen (IEEE Xplore Digital Library, viewed March 20, 2018).
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