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2012 IEEE 25th International Conference on Micro Electro Mechanical Systems
- Format:
- Book
- Conference/Event
- Author/Creator:
- IEEE Staff, Corporate Author.
- Conference Name:
- IEEE International Conference on Micro Electro Mechanical Systems (25th : 2012 : Paris, France)
- IEEE International Conference on Micro Electro Mechanical Systems (25th : 2012 : Paris, France), author.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (1375 pages) : illustrations
- Place of Publication:
- [Place of publication not identified] IEEE 2012
- Language Note:
- English
- Contents:
- v. 1. pages 1-691
- v. 2. pages 692-1375
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 9781467303255
- 1467303259
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