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2012 70th Annual Device Research Conference
- Format:
- Book
- Author/Creator:
- ieee, Corporate Author.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Reliability--Congresses.
- Microelectromechanical systems.
- Microelectromechanical systems--Design and construction--Congresses.
- Physical Description:
- 1 online resource (278 pages)
- Place of Publication:
- [Place of publication not identified] IEEE 2012
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 9781467311649
- 1467311642
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