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2010 Proceedings of VIth International Conference on Perspective Technologies and Methods in MEMS Design / IEEE.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author, issuing body.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (xi, 268 pages)
- Place of Publication:
- [Place of publication not identified] : IEEE, [2010]
- Notes:
- Description based on publisher supplied metadata and other sources.
- Includes index.
- ISBN:
- 966-2191-11-9
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