2010 Symposium on VLSI Technology

Format:

Book

Author/Creator:

Institute of Electrical and Electronics Engineers (IEEE), author, issuing body.

Contributor:

IEEE Staff, Contributor.

Language:

English

Subjects (All):

Computers--Circuits--Congresses.

Computers.

Integrated circuits--Very large scale integration--Congresses.

Integrated circuits.

Physical Description:

1 online resource : illustrations

Place of Publication:

[Place of publication not identified] I E E E 2010

Language Note:

English

Summary:

Anomalous threshold voltage increase with area scaling of Mg- or La-incorporated high-k gate dielectrics has great impact on scaled devices. This paper reveals that much amount of Mg or La capping effects for Vt reduction was disappeared with the increase of electron mobility in narrow channel nMISFETs. This phenomenon is explained with absorption of Mg and La into STI from bulk high-k layer. The key to suppress the area scaling dependence is pilling Mg or La atoms up near high-k/IFL interface which enable us increase of stable capping effect. Combination of processing for high-k gate dielectrics and device structure with the high-k dielectrics under offset spacers was found to effectively suppress the Vt increase at the 100 nm channel width. As a conclusion, the large capping effect for Vt reduction over 400 mV is achieved in scaled devices using this technique.

Notes:

Bibliographic Level Mode of Issuance: Monograph

ISBN:

9781424454501

1424454506