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TENCON 2010 - 2010 IEEE Region 10 Conference
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author, issuing body.
- Language:
- English
- Subjects (All):
- Computer networks--Congresses.
- Computer networks.
- Physical Description:
- 1 online resource (liv, 2481 pages)
- Place of Publication:
- [Place of publication not identified] IEEE 2010
- Language Note:
- English
- Summary:
- Aluminum-doped zinc oxide (AZO) is one of the promising transparent conductive oxide materials, which is expected to be an alternative to tin-doped indium oxide (ITO) that for long has been widely used in industry. The authors have been engaged in the development of AZO deposition process using inductively-coupled plasma assisted sputtering in a couple of years. This paper reports the results showing effectiveness of inductively coupled plasma (ICP) assisted sputtering in AZO film deposition process.
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 9781424468904
- 1424468906
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