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ISSM 2006 : 15th International Symposium on Semiconductor Manufacturing.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Symposium on Semiconductor Manufacturing (15th : 2006 : Tokyo, Japan)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Electronic industries--Congresses.
- Electronic industries.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Physical Description:
- 1 online resource (503 pages)
- Place of Publication:
- New York : IEEE, 2008.
- Notes:
- Description based on: online resource; title from pdf title page (IEEE Xplore Digital Library, viewed February 26, 2018).
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