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Perspective Technologies and Methods in MEMS Design : proceeding of the Vth International Conference, MEMSTECH 2009 : 22-24 April 2009, Lviv-Polyana, Ukraine / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Conference/Event
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author.
- Conference Name:
- International Conference of Young Scientists "Perspective Technologies and Methods in MEMS Design" (5th : 2009 : L'viv, Ukraine)
- Language:
- English
- Subjects (All):
- Microfabrication--Congresses.
- Microfabrication.
- Microelectromechanical systems--Design and construction--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource (195 pages)
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2009.
- Notes:
- Includes index.
- Description based on: online resource; title from pdf title page (IEEE Xplore, viewed June 2, 2020).
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