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15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy / IEEE Electron Devices Society.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Advanced Thermal Processing of Semiconductors (15th : 2007 : Catania, Italy)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Semiconductors.
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Other Title:
- 2007 15th International Conference on Advanced Thermal Processing of Semiconductors
- Computer and Automation Engineering
- Place of Publication:
- IEEE
- ISBN:
- 9781509082155
- 1509082158
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