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Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan
- Format:
- Book
- Conference/Event
- Author/Creator:
- International Microprocesses and Nanotechnology Conference, Corporate Author.
- Conference Name:
- International Microprocesses and Nanotechnology Conference (20th : 2007 : Kyoto, Japan)
- International Microprocesses and Nanotechnology Conference
- Language:
- English
- Subjects (All):
- Nanotechnology--Congresses.
- Nanotechnology.
- Microelectronics--Congresses.
- Microelectronics.
- Microlithography--Congresses.
- Microlithography.
- Place of Publication:
- [Place of publication not identified] Japan Society of Applied Physics 2007
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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