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The Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators 2006 : 28 April 2006.

IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online

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Format:
Book
Author/Creator:
Institute of Electrical and Electronics Engineers, author, issuing body.
Series:
Conference publication (Institution of Electrical Engineers), no. 11367
Language:
English
Subjects (All):
Microelectromechanical systems--Congresses.
Microelectromechanical systems.
Detectors--Congresses.
Detectors.
Physical Description:
1 online resource (324 pages)
Contained In:
Visual Media Production (CVMP), Conference for
Place of Publication:
Stevenage, England : IET, 2006.
Notes:
Description based on: online resource; title from title screen (IEEE Xplore Digital Library, viewed March 21, 2018).

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