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Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan
- Format:
- Book
- Conference/Event
- Author/Creator:
- International Microprocesses and Nanotechnology Conference, Corporate Author.
- Conference Name:
- International Microprocesses and Nanotechnology Conference (2004 : Osaka, Japan)
- International Microprocesses and Nanotechnology Conference
- Language:
- English
- Subjects (All):
- Microfabrication--Very large scale integration--Design and construction--Congresses.
- Microfabrication.
- Integrated circuits--Congresses.
- Integrated circuits.
- Lithography--Congresses.
- Lithography.
- Nanotechnology--Congresses.
- Nanotechnology.
- Microelectronics--Congresses.
- Microelectronics.
- Place of Publication:
- [Place of publication not identified] Japan Society of Applied Physics 2004
- Language Note:
- English
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
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