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Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan

IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online

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Format:
Book
Conference/Event
Author/Creator:
International Microprocesses and Nanotechnology Conference, Corporate Author.
Contributor:
Ōyō Butsuri Gakkai, Content Provider.
American Vacuum Society, Content Provider.
IEEE Electron Devices Society, Content Provider.
Conference Name:
International Microprocesses and Nanotechnology Conference (2004 : Osaka, Japan)
International Microprocesses and Nanotechnology Conference
Language:
English
Subjects (All):
Microfabrication--Very large scale integration--Design and construction--Congresses.
Microfabrication.
Integrated circuits--Congresses.
Integrated circuits.
Lithography--Congresses.
Lithography.
Nanotechnology--Congresses.
Nanotechnology.
Microelectronics--Congresses.
Microelectronics.
Place of Publication:
[Place of publication not identified] Japan Society of Applied Physics 2004
Language Note:
English
Notes:
Bibliographic Level Mode of Issuance: Monograph

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