1 option
RTP 2001 : 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / D.P. DeWitt ... [et al.], editors.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Advanced Thermal Processing of Semiconductors (9th : 2001 : Anchorage, Alaska)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Semiconductors.
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Place of Publication:
- IEEE
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.