4 options
Microlithography world.
Gale Academic OneFile Available from 05/01/2002 volume: 11 issue: 2 until 11/30/2008 volume: 17 issue: 4. Available online
View onlineGale Business: Insights (formerly Business Insights: Global) Available from 05/01/2002 volume: 11 issue: 2 until 11/30/2008 volume: 17 issue: 4. Available online
View onlineGale General OneFile Available from 05/01/2002 volume: 11 issue: 2 until 11/30/2008 volume: 17 issue: 4. Available online
View online- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Periodicals.
- Semiconductors.
- Microlithography--Periodicals.
- Microlithography.
- Masks (Electronics)--Periodicals.
- Masks (Electronics).
- Semiconductors--Design and construction.
- Genre:
- Periodicals.
- Physical Description:
- 1 online resource
- Quarterly, Jan./Feb./Mar. 1993-
- Vol. 1, no. 1 (Mar./Apr. 1992)-
- Ceased with v. 17, no. 4 (Nov. 2008).
- Place of Publication:
- Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992]-2008.
- Notes:
- Title from cover.
- Published: Tulsa, OK, Oct., Nov., Dec. 1993-
- Latest issue consulted: Vol. 4, no. 2 (spring 1995).
- Other Format:
- Print version: Microlithography world.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.