Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Format:

Book

Author/Creator:

National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.

Language:

English

Subjects (All):

Microelectronics industry.

Molecular beams--Industrial applications.

Molecular beams.

Microelectronics--Materials.

Microelectronics.

Plasma-enhanced chemical vapor deposition--Industrial applications.

Plasma-enhanced chemical vapor deposition.

Physical Description:

1 online resource (101 p.)

Edition:

1st ed.

Place of Publication:

Washington, D.C. : National Academy Press, 1992.

Language Note:

English

Summary:

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

Contents:

BEAM TECHNOLOGIES FOR INTEGRATED PROCESSING

Copyright

ABSTRACT

PREFACE

ACKNOWLEDGMENTS

Contents

1 Introduction

2 SUMMARY AND RECOMMENDATIONS

SUMMARY

Electronic Materials

Engineered Materials

Integrated Processing

RECOMMENDATIONS

3 BEAM TECHNOLOGIES

ATOMIC AND MOLECULAR MATERIAL BEAMS

Physical Vapor Deposition

Direct Evaporation Processes

Direct Reactive Evaporation Processes

Direct Sputtering Processes

Reactive Sputtering Processes

Ion Beam Sputtering Processes

Molecular Beam Epitaxy

Chemical Vapor Deposition Processes

Microwave Electron Cyclotron Resonance Plasmas

Ion Beams

Energy Beams

Laser Beams

Electron Beams

X-Ray Lithography

Microwave Beams

REFERENCES

4 BEAM APPLICATIONS IN MICROELECTRONICS

BEAM APPLICATIONS IN SEMICONDUCTOR DEVICE MANUFACTURE

Silicon Integrated Circuits

Beam Technologies For Materials Deposition

Beam Technologies For Patterning

Beam Technologies For Etching

BEAM TECHNOLOGIES FOR COMPOUND SEMICONDUCTOR ICS

Beam Technologies For Heating

OPTOELECTRONICS

5 BEAM APPLICATIONS IN ENGINEERED MATERIALS

COATINGS

Diamond, Diamond-Like Carbon, And Cubic Boron Nitride Coatings

SURFACE MODIFICATION

APPLICATIONS OF LASERS TO MATERIALS FORMING

Shaping And Removal

Desktop Deposition

Joining

POWDER PREPARATION

COMPOSITES FABRICATION

Fiber And Whisker Preparation

Metal-Matrix Composites Fabrication

Ceramic-Matrix Composites Fabrication

NANOPHASE MATERIALS

OPTICAL SURFACES AND DEVICES

POLYMERS

MATERIALS FOR ENERGY PRODUCTION

BIOIMPLANT DEVICES

6 INTEGRATED PROCESSING

INTEGRATED PROCESSING IN MICROELECTRONICS

Integrated Processing For Integrated Circuits.

Traditional Integrated Circuit Processing Techniques

Advances Toward Integrated Processing

Integrated Processing Tools

Applications For Integrated Processing Tools

INTEGRATED PROCESSING FOR METALS AND CERAMICS

Architectural Glass Coatings

In-Line Dry Coating Process For Stainless Steel Sheet

Mechanical Fabrication

7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION

REFERENCE

APPENDIX A ACRONYMS AND ABBREVIATIONS

APPENDIX B BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS.

Notes:

"NMAB-461."

Includes bibliographical references.

ISBN:

9786610211470

9781280211478

1280211474

9780309583954

0309583950

9780585149455

0585149453

OCLC:

44965115