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Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
- Format:
- Book
- Author/Creator:
- National Research Council (U.S.). Panel on Plasma Processing of Materials.
- Language:
- English
- Subjects (All):
- Plasma engineering.
- Microelectronics--Materials--Effect of radiation on.
- Microelectronics.
- Surfaces (Technology).
- Physical Description:
- 1 online resource (87 p.)
- Edition:
- 1st ed.
- Place of Publication:
- Washington, D.C. : National Academy Press, 1991.
- Language Note:
- English
- Summary:
- Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world--electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
- Contents:
- Plasma Processing of Materials:
- Copyright
- Preface
- Acknowledgments
- Contents
- 1 Summary, Findings, Conclusions, And Recommendations
- SUMMARY
- FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS
- 2 Plasma Processing And Low-Energy Plasma Science
- CLASSIFICATION OF PLASMAS
- BRIEF HISTORY OF LOW-ENERGY PLASMA SCIENCE AND TECHNOLOGY
- INDUSTRIAL APPLICATIONS OF PLASMA PROCESSING OF MATERIALS
- INTERFACE BETWEEN BASIC PLASMA SCIENCE AND APPLICATIONS
- SCOPE OF THIS REPORT
- 3 Plasma Processing In The Electronics Industry
- MICROELECTRONICS FABRICATION
- PLASMA ETCHING
- Anisotropy
- Selectivity
- Uniformity
- Damage
- New Materials
- PLASMA DEPOSITION
- Planarization, Filling, and Interconnection
- Surface Modification
- PLASMA CLEANING
- LOW-PRESSURE PLASMA REACTOR TECHNOLOGY
- Single-Wafer Processing
- Process Control
- New Plasma Sources
- Magnetic Confinement
- Downstream Processing
- Modulated Processing
- Clustered Processing
- THERMAL PLASMA REACTOR TECHNOLOGY
- TOWARD FLEXIBLE MICROELECTRONICS MANUFACTURING
- FINDINGS AND CONCLUSIONS
- 4 Scientific Foundation of Plasma Processing
- SURFACE PROCESSES
- Theory and Simulation
- Experimental Studies
- Beam-Surface Experiments
- Ex Situ Analysis
- PLASMA GENERATION AND TRANSPORT
- Low-Pressure Plasma Modeling
- Analysis
- Fluid Simulations
- Particle-In-Cell and Kinetic Simulations
- Thermal Plasma Modeling
- Toward Cad Tools And Expert Systems
- Chemical Kinetics
- Multidimensional Modeling and Magnetic Effects
- Stability of Processing Plasmas
- Accuracy and Reliability of Numerical Simulation Methods
- Plasma Diagnostics
- Positive Ions and Neutrals
- Electron Density and Energy Distribution
- Fields
- Negative Ions
- Particulates
- Reference Reactors
- Data Base for Plasma Generation and Transport
- Present Status.
- Needs
- Distribution of Information
- PLASMA-SURFACE INTERACTIONS
- Boundary Conditions
- Passive Surfaces
- Microstructure Evolution
- In Situ Analysis
- FUNDING FOR PLASMA PROCESSING RESEARCH
- Japanese Research
- French Research
- 5 Educational Issues
- EDUCATIONAL REQUIREMENTS FOR UNDERGRADUATES
- Laboratory Courses and the Scientific Method
- Research Experiences and Cooperative Programs
- U.S. GRADUATE EDUCATION
- TEXTS AND COMPUTER-AIDED INSTRUCTION
- FACULTY DEVELOPMENT
- CONTINUING EDUCATION
- FOREIGN EDUCATIONAL OFFERINGS
- Japan
- France
- Appendix Participants in Workshop on Plasma Processing of Materials.
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 9786610203369
- 9781280203367
- 1280203366
- 9780309583756
- 0309583756
- 9780585084633
- 0585084637
- OCLC:
- 43475627
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