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Handbook of thin film technology / Hartmut Frey, Hamid R. Khan, editors.
Van Pelt Library TA418.9.T45 H363 2015
Available
- Format:
- Book
- Language:
- English
- Subjects (All):
- Thin films--Handbooks, manuals, etc.
- Thin films.
- Genre:
- Handbooks and manuals.
- Physical Description:
- xiii, 379 pages : illustrations ; 26 cm
- Place of Publication:
- Berlin : Springer, [2015]
- Contents:
- Applications and developments of thin film technology
- Importance of the vacuum technology for thin film coatings
- Evaporation in the vacuum
- Basic principle of plasma physics
- Gaseous phase and surface processes
- Coating by cathode sputtering
- Plasma treatment methods
- Ion beam-supported procedures
- Chemical Vapor Deposition (CVD)
- Physical basics of modern methods of surface and thin film analysis
- Measurements of thin layers during the coating
- Measurements of thin layers after terminated coating process
- Nanoparticle Films
- Optical properties of thin films.
- ISBN:
- 9783642054297
- 3642054293
- OCLC:
- 913832246
- Access Restriction:
- Includes bibliographical references and index.
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