Thin film transistors : materials and processes / edited by Yue Kuo.

Format:

Book

Contributor:

Kuo, Yue.

Rosengarten Family Fund.

Language:

English

Subjects (All):

Thin film transistors.

Physical Description:

2 volumes : illustrations ; 25 cm

Place of Publication:

Boston : Kluwer Academic Publishers, [2004]

Summary:

This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.

Contents:

v. 1. Amorphous silicon thin film transistors

v. 2. Polycrystalline silicon thin film transistors.

Local Notes:

Acquired for the Penn Libraries with assistance from the Rosengarten Family Fund.

ISBN:

1402075057

9781402075056

1402075065

9781402075063

1402075049

9781402075049

OCLC:

53019749

Online:

Publisher description