2 options
ASMC 2009 : the 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 11-13 May, Berlin, Germany / co-sponsors: IEEE ... [and others].
Connect to full text Available online
View online- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (20th : 2009 : Stresa, Italy)
- Language:
- English
- Subjects (All):
- Process control--Congresses.
- Process control.
- Power semiconductors--Congresses.
- Power semiconductors.
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource (262 pages) : illustrations
- Other Title:
- Advanced Semiconductor Manufacturing Conference
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference
- Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
- Twentieth Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
- 20th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
- Place of Publication:
- [Piscataway, NJ] : [IEEE], [2009]
- System Details:
- text file
- Notes:
- The conference was canceled but the papers that were to be presented at the conference were published.
- Title from the conference home page (http://www.semi.org/en/P043800), viewed July 17/09.
- Includes bibliographical references.
- OCLC:
- 613471004
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.