2 options
17th IEEE Conference on Advanced Thermal Processing of Semiconductors : RTP 2009 : September 29-October 2, 2009, Albany Marriott, Albany, NY / [IEEE Electron Devices Society].
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Advanced Thermal Processing of Semiconductors (17th : 2009 : Albany, N.Y.)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Semiconductors.
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Semiconductors--Defects.
- Semiconductors--Heat treatment.
- Ebooks--UML.
- Local Subjects:
- Ebooks--UML.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 1 online resource : illustrations
- Other Title:
- RTP 2009
- 17th IEEE International Conference on Advanced Thermal Processing of Semiconductors
- Available from some providers with title: Advanced Thermal Processing of Semiconductors, 2009. RTP '09. 17th International Conference on
- Place of Publication:
- Piscataway, NJ : IEEE, [2009]
- System Details:
- text file
- Notes:
- Title from PDF copyright page (IEEE Xplore, viewed on Apr. 5, 2010).
- Includes bibliographical references.
- "IEEE Catalog Number: CFP09TPS-CDR."
- ISBN:
- 1424438144
- 9781424438143
- ISSN:
- 1944-0251
- OCLC:
- 600218973
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.