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Design, modeling and control of nanopositioning systems / Andrew J. Fleming, Kam K. Leang.

Van Pelt Library T174.7 .F573 2014
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Format:
Book
Author/Creator:
Fleming, Andrew J., 1977-
Leang, Kam K., author.
Language:
English
Subjects (All):
Nanotechnology.
Nanoelectromechanical systems.
Physical Description:
xvi, 411 pages : illustrations (some color) ; 24 cm
Place of Publication:
Cham, [Switzerland] : Springer, [2014]
Notes:
Includes bibliographical references and index.
ISBN:
3319066161
9783319066165
OCLC:
875742045

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