Copper electrodeposition for nanofabrication of electronics devices / Kazuo Kondo, Rohan N. Akolkar, Dale P. Barkey, Masayuki Yokoi, editors.

Format:

Book

Contributor:

Kondō, Kazuo, 1911- editor.

Akolkar, Rohan N., editor.

Barkey, Dale Paul, editor.

Yokoi, Masayuki, editor.

Series:

Nanostructure science and technology 1571-5744

Nanostructure science and technology, 1571-5744 ; Volume 171

Language:

English

Subjects (All):

Copper plating.

Physical Description:

viii, 282 pages : illustrations (some color) ; 24 cm.

Place of Publication:

New York : Springer, [2014]

Notes:

Includes bibliographical references.

ISBN:

9781461491750

1461491754

OCLC:

857964060