Practical guide to RF-MEMS / Jacopo Iannacci.

Format:

Book

Author/Creator:

Iannacci, Jacopo, author.

Language:

English

Subjects (All):

Radio frequency microelectromechanical systems.

Physical Description:

xvi, 344 pages : illustrations (chiefly colour) ; 25 cm

Edition:

First edition.

Place of Publication:

Weinheim, Germany : Wiley-VCH Verlag GmbH & Co. KGaA, 2013.

Summary:

Providing researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radio-frequency applications. To begin with, prototypical RF-MEMS devices, including lumped components and complex networks, are presented as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. The text explicitly treats the hard-to-predict interplay between the three-dimensional device structure and its electromagnetic functionality. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages, and simulation results are validated against experimental results. With its design and simulation examples based on such widely-known software packages as ANSYS and the hardware description language Verilog, this guide will appeal to the practice-oriented R&D reader. Book jacket.

Contents:

1 RF-MEMS Applications and the State of the Art 1

1.1 Introduction 7

1.2 A Brief History of MEMS and RF-MEMS from the Perspective of Technology 2

1.3 RF-MEMS Lumped Components 3

1.3.1 Variable Capacitors 4

1.3.2 Inductors 10

1.3.3 Ohmic and Capacitive Switches 12

1.4 RF-MEMS Complex Networks 20

1.4.1 Reconfigurable Impedance-Matching Networks 20

1.4.2 Reconfigurable RF Power Attenuators 23

1.4.3 Reconfigurable Phase Shifters and Delay Lines 26

1.4.4 Reconfigurable Switching Matrices 26

1.5 Modeling and Simulation of RF-MEMS Devices 28

1.5.1 The Finite Element Method Approach 28

1.5.2 Compact Modeling of RF-MEMS 28

1.5.3 Mixed-Domain Electromechanical Simulation Environment- 30

1.6 Packaging of RF-MEMS 31

1.7 Brief Overview of Exploitation of RF-MEMS in RF Systems 33

1.8 Conclusions 38

2 The Book in Brief 41

2.1 Introduction 41

2.2 A Brief Introduction to the FBK RF-MEMS Technology 42

2.3 An RF-MEMS Series Ohmic Switch (Dev A) 44

2.4 RF-MEMS Capacitive Switches/Varactors 49

2.4.1 Design 1 (Dev B1) 49

2.4.2 Design 2 (Dev B2) 50

2.4.3 RF-MEMS Ohmic Switch with Microheaters (Dev C) 50

2.4.4 MEMS-Based Reconfigurable RF Power Attenuator (Dev D) 52

2.4.5 MEMS-Based Reconfigurable Impedance-Matching Network (Dev E) 55

2.5 Conclusions 55

3 Design 57

3.1 Introduction 57

3.2 Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology 58

3.3 Design of an RF-MEMS Series Ohmic Switch (Dev A) 60

3.4 Generation of 3D Models Starting from the 2D Layout 77

3.5 Conclusions 83

4 Simulation Techniques (Commercial Tools) 85

4.1 Introduction 85

4.2 Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS Multiphysics™ 86

4.2.1 Block 1: Definition of the Geometry and Properties of the Material 88

4.2.2 Block 2: Meshing of the Structure 92

4.2.3 Block 3: Generation of the Elements for the Electromechanical Coupling 93

4.2.4 Block 4: Definition of the Mechanical Boundary Conditions 95

4.2.5 Block 5: Definition of the Simulation 97

4.2.6 Block 6: Simulation Execution 99

4.2.7 Block 7: Postprocessing and Visualization of Results 99

4.3 Modal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics 101

4.4 Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics 104

4.5 RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSS™ 121

4.6 Conclusions 130

5 On-Purpose Simulation Tools 133

5.1 Introduction 133

5.2 MEMS Compact Model Library 134

5.2.1 Suspended Rigid Plate Electromechanical Transducer 134

5.2.2 Flexible Beam 140

5.2.3 Simulation Validation of a MEMS Toggle Switch 144

5.3 A Hybrid RF-MEMS/CMOS VCO 149

5.4 Excerpts of Verilog-A Code Implemented for MEMS Models 151

5.4.1 Anchor Point 152

5.4.2 Force Source 154

5.4.3 Flexible Beam 157

5.5 Conclusions 165

6 Packaging and Integration 167

6.1 Introduction 167

6.2 A WLP Solution for RF-MEMS Devices and Networks 168

6.2.1 Package Fabrication Process 169

6.2.2 Wafer-to-Wafer Bonding Solutions 173

6.3 Encapsulation of RF-MEMS Devices 177

6.3.1 The Issue of Wafer-to-Wafer Alignment 178

6.3.2 Hybrid Packaging Solutions for RF-MEMS Devices 180

6.4 Fabrication Run of Packaged Test Structures 181

6.5 Electromagnetic Characterization of the Package 185

6.5.1 Validation of the S-parameter Simulations of Packaged Test Structures 186

6.5.2 Parameterized S-parameter Simulation of Packaged Test Structures 187

6.6 Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices 191

6.7 Conclusions 194

7 Postfabrication Modeling and Simulations 195

7.1 Introduction 195

7.2 Electromechanical Simulation of an RF-MEMS Varactor (Dev B2) with Compact Models 196

7.3 RF Modeling of an RF-MEMS Varactor (Dev B2) with a Lumped Element Network 202

7.4 Electromechanical Modeling of an RF-MEMS Series Ohmic Switch (Dev A) with Compact Models 213

7.5 Electromagnetic Modeling and Simulation of an RF-MEMS Impedance-Matching Network (Dev E) for a GSM CMOS Power Amplifier 218

7.5.1 Introduction 219

7.5.2 Electromagnetic Design and Optimization of the RF-MEMS Impedance-Matching Network 219

7.5.3 Deign of a Reconfigurable Class E PA 224

7.5.4 Experimental Results for the Hybrid RF-M EMS/CMOS PA 227

7.6 Electromagnetic Simulation of an RF-MFMS Capacitive Switch (Dev B1) in ANSYS HFSS™ 229

7.7 Electromagnetic Simulation of a MEMS-Based Reconfigurable RF Power Attenuator (Dev D) in ANSYS HFSS 234

7.8 Conclusions 238.

Notes:

Includes bibliographical references (pages 317-329) and index.

ISBN:

9783527335640

3527335641

OCLC:

864949128