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Silicon run lithography / a film by Ruth A. Carranza [in collaboration with the Stanford Nanofabrication Facility] ; producer/director, Ruth A. Carranza ; writers, Ruth Carranza, John Shott.
LIBRA DVD 024 342
Available from offsite location
- Format:
- Video
- Language:
- English
- Subjects (All):
- Photolithography.
- Integrated circuits--Design and construction.
- Integrated circuits.
- Genre:
- Documentary films.
- Video recordings.
- Physical Description:
- 1 videodisc (31 min.) : sound, color ; 4 3/4 in.
- polychrome
- Other Title:
- Lithography
- Place of Publication:
- Mountain View, CA : Ruth Carranza Productions : Silicon Run Productions, [2004]
- System Details:
- DVD; NTSC.
- digital
- optical
- NTSC
- video file
- DVD video
- Summary:
- Features an in-depth look at the photolithography process in IC manufacturing, includes wafer preparation, photoresist coating, exposure (using i-line steppers and DUV scanners), wafer developing and inspection.
- Contents:
- Introduction
- Fabrication overview
- Photolithography station
- Track system
- I-line stepper
- DUV excimer scanner
- Ending and credits.
- Participant:
- Narrator, Susan Jerome.
- Credits:
- Music, Neil Panton.
- Notes:
- A presentation of Intel Foundation, Nikon Precision, Shipley, Cymer, Applied Materials, Inc., Semiconductor Equipment and Materials International, Stanford Nanofabrication Facility.
- OCLC:
- 57713258
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