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Nanoimprint lithography : an enabling process for nanofabrication / Weimin Zhou.
Van Pelt Library TK7874.84 .Z46 2013
Available
- Format:
- Book
- Author/Creator:
- Zhou, Weimin, author.
- Language:
- English
- Subjects (All):
- Nanoelectronics.
- Microlithography.
- Nanostructures.
- Physical Description:
- xiii, 256 pages : illustrations (some color) ; 24 cm
- Place of Publication:
- Heidelberg : Springer, [2013]
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 3642344275
- 9783642344275
- OCLC:
- 812570687
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