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Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
LIBRA TR940 .I57 1994
Available from offsite location
- Format:
- Book
- Series:
- ACS professional reference book
- Language:
- English
- Subjects (All):
- Microlithography--Congresses.
- Microlithography.
- Photoresists--Congresses.
- Photoresists.
- Plasma etching--Congresses.
- Plasma etching.
- Semiconductors--Etching--Congresses.
- Semiconductors.
- Semiconductors--Etching.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xiv, 527 pages : illustrations ; 24 cm.
- Edition:
- Second edition.
- Place of Publication:
- Washington, DC : American Chemical Society, 1994.
- Contents:
- An introduction to lithography / Larry F. Thompson
- The lithographic process / Murrae J. Bowden
- Organic resist materials / C. Grant Willson
- Resist processing / Larry Thompson
- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0841228485
- 9780841228481
- OCLC:
- 29359317
- Online:
- Publisher description
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