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IEEE transactions on semiconductor manufacturing.
LIBRA TK7871.85 .I226 v.1 (1988)-v.13 (2000)
Available from offsite location
- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Semiconductor industry--Periodicals.
- Semiconductor industry.
- Genre:
- Periodicals.
- Physical Description:
- Quarterly
- Vol. 1, no. 1 (Feb. 1988)-
- Other Title:
- Transactions on semiconductor manufacturing
- Place of Publication:
- New York : IEEE, c1988-
- Notes:
- Issued by: IEEE Components, Hybrids and Manufacturing Technology Society; IEEE Electron Devices Society; IEEE Reliability Society; and IEEE Solid-State Circuits Council.
- Other Format:
- IEEE transactions on semiconductor manufacturing (Online)
- ISSN:
- 0894-6507
- OCLC:
- 16152423
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