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Introduction to microfabrication / Sami Franssila.
Connect to full text. Available online
View online- Format:
- Book
- Author/Creator:
- Franssila, Sami.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems.
- Electronic apparatus and appliances.
- Microfabrication.
- Physical Description:
- 1 online resource (xiv, 518 pages) : illustrations
- polychrome
- Edition:
- Second edition.
- Place of Publication:
- Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
- System Details:
- text file
- Contents:
- Front Matter
- Introduction
- Micrometrology and Materials Characterization
- Simulation of Microfabrication Processes
- Silicon
- Thin-Film Materials and Processes
- Epitaxy
- Advanced Thin Films
- Pattern Generation
- Optical Lithography
- Advanced Lithography
- Etching
- Wafer Cleaning and Surface Preparation
- Thermal Oxidation
- Diffusion
- Ion Implantation
- CMP: Chemical₆Mechanical Polishing
- Bonding
- Polymer Microprocessing
- Glass Microprocessing
- Anisotropic Wet Etching
- Deep Reactive Ion Etching
- Wafer Engineering
- Special Processes and Materials
- Serial Microprocessing
- Process Integration
- MOS Transistor Fabrication
- Bipolar Transistors
- Multilevel Metallization
- Surface Micromachining
- MEMS Process Integration
- Process Equipment
- Equipment for Hot Processes
- Vacuum and Plasmas
- CVD and Epitaxy Equipment
- Cleanrooms
- Yield and Reliability
- Economics of Microfabrication
- Moore's Law and Scaling Trends
- Microfabrication at Large
- Appendix A: Properties of Silicon
- Appendix B: Constants and Conversion Factors
- Appendix C: Oxide and Nitride Thickness by Color
- Index.
- Notes:
- Includes bibliographical references and index.
- Electronic reproduction. Hoboken, N.J. Available via World Wide Web.
- Description based on print version record.
- Local Notes:
- Acquired for the Penn Libraries with assistance from the Class of 1953 Fund.
- Other Format:
- Print version: Franssila, Sami. Introduction to microfabrication.
- ISBN:
- 10.1002/9781119990413
- 9781119990413
- 1119990416
- 9780470666722
- 0470666722
- Publisher Number:
- 99943881685
- Access Restriction:
- Restricted for use by site license.
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