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VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.
LIBRA TK7874 .G473 1983
Available from offsite location
- Format:
- Book
- Author/Creator:
- Ghandhi, Sorab Khushro, 1928-
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration.
- Integrated circuits.
- Silicon.
- Gallium arsenide.
- Physical Description:
- xi, 665 pages : illustrations ; 24 cm
- Other Title:
- V.L.S.I. fabrication principles.
- Place of Publication:
- New York : Wiley, [1983]
- Notes:
- "A Wiley-Interscience publication."
- Includes bibliographical references and index.
- ISBN:
- 0471868337 :
- OCLC:
- 8589352
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