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RTP 2001. 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / D.P. DeWitt ... [and others], editors.
IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online
IEEE Xplore (IEEE/IET Electronic Library - IEL)- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Advanced Thermal Processing of Semiconductors (9th : 2001 : Anchorage, Alaska)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Rapid thermal processing--Congresses.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Semiconductors--Defects.
- Rapid thermal processing.
- Semiconductors--Heat treatment.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- 326 pages : illustrations
- Other Title:
- Advanced thermal processing of semiconductors
- Place of Publication:
- [Piscataway, New Jersey] : [IEEE] : RTP Conference, [2001]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE Catalog Number: 01EX513"--T.p. verso.
- Includes bibliographical references.
- OCLC:
- 60741802
- Access Restriction:
- Restricted for use by site license.
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