RTP 2001. 9th International Conference on Advanced Thermal Processing of Semiconductors : September 25-29, 2001, Hilton Anchorage, Alaska / D.P. DeWitt ... [and others], editors.

Format:

• Book
• Conference/Event

Contributor:

• DeWitt, David P., 1934-2005.
• IEEE Xplore (Online service)
• Institute of Electrical and Electronics Engineers.

Conference Name:

• International Conference on Advanced Thermal Processing of Semiconductors (9th : 2001 : Anchorage, Alaska)

Language:

English

Subjects (All):

• Semiconductors--Heat treatment--Congresses.
• Rapid thermal processing--Congresses.
• Semiconductor doping--Congresses.
• Semiconductor doping.
• Semiconductors--Defects--Congresses.
• Semiconductors--Defects.
• Rapid thermal processing.
• Semiconductors--Heat treatment.

Genre:

• Conference papers and proceedings.

Physical Description:

326 pages : illustrations

Other Title:

Advanced thermal processing of semiconductors

Place of Publication:

[Piscataway, New Jersey] : [IEEE] : RTP Conference, [2001]

System Details:

• Mode of access: World Wide Web.
• text file

Notes:

• "IEEE Catalog Number: 01EX513"--T.p. verso.
• Includes bibliographical references.

OCLC:

60741802

Access Restriction:

Restricted for use by site license.