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ASMC 2004. the 15th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : Advancing the science and technology of semiconductor manufacturing : May 4-6, 2004, Seaport Hotel, Boston, Massachusetts, USA / sponsored by IEEE Electron Devices Society ... [and others].
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- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (15th : 2004 : Boston, Mass.)
- Language:
- English
- Subjects (All):
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Process control--Congresses.
- Process control.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xi unnumbered pages, 507 pages : illustrations
- Other Title:
- Advancing the science and technology of semiconductor manufacturing
- Advancing the science of semiconductor manufacturing excellence
- Advanced Semiconductor Manufacturing Conference and Workshop
- Advanced Semiconductor Manufacturing, 2004, ASMC '04, IEEE Conference and Workshop.
- Place of Publication:
- Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, [2004]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Cover title.
- "Advancing the science of semiconductor manufacturing excellence"--P. [i].
- "IEEE Catalog Number: 03CH37530"--P. ii.
- Includes bibliographical references.
- ISBN:
- 0780383125
- 9780780383128
- OCLC:
- 55153362
- Access Restriction:
- Restricted for use by site license.
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