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ASMC 2004. the 15th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : Advancing the science and technology of semiconductor manufacturing : May 4-6, 2004, Seaport Hotel, Boston, Massachusetts, USA / sponsored by IEEE Electron Devices Society ... [and others].

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Format:
Book
Conference/Event
Contributor:
IEEE Xplore (Online service)
IEEE Electron Devices Society.
Semiconductor Equipment and Materials International.
Conference Name:
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (15th : 2004 : Boston, Mass.)
Language:
English
Subjects (All):
Semiconductor industry--Congresses.
Semiconductor industry.
Semiconductors--Design and construction--Congresses.
Semiconductors.
Semiconductors--Design and construction.
Process control--Congresses.
Process control.
Genre:
Conference papers and proceedings.
Physical Description:
xi unnumbered pages, 507 pages : illustrations
Other Title:
Advancing the science and technology of semiconductor manufacturing
Advancing the science of semiconductor manufacturing excellence
Advanced Semiconductor Manufacturing Conference and Workshop
Advanced Semiconductor Manufacturing, 2004, ASMC '04, IEEE Conference and Workshop.
Place of Publication:
Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, [2004]
System Details:
Mode of access: World Wide Web.
text file
Notes:
Cover title.
"Advancing the science of semiconductor manufacturing excellence"--P. [i].
"IEEE Catalog Number: 03CH37530"--P. ii.
Includes bibliographical references.
ISBN:
0780383125
9780780383128
OCLC:
55153362
Access Restriction:
Restricted for use by site license.

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