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Microprocesses and nanotechnology 2003. digest of papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [and others].
- Format:
- Book
- Conference/Event
- Conference Name:
- International Microprocesses and Nanotechnology Conference (16th : 2003 : Tokyo, Japan)
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration--Design and construction--Congresses.
- Integrated circuits.
- Integrated circuits--Very large scale integration--Design and construction.
- Lithography--Congresses.
- Lithography.
- Nanotechnology--Congresses.
- Nanotechnology.
- Microelectronics--Congresses.
- Microelectronics.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xxv, 349 pages, 8 unnumbered pages : illustrations
- Place of Publication:
- Tokyo, Japan : Business Center for Academic Societies Japan, [2003]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Contains advertising material.
- "JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso.
- Conference number extrapolated.
- Includes bibliographical references and author index.
- ISBN:
- 4891140402
- 9784891140403
- OCLC:
- 54523993
- Access Restriction:
- Restricted for use by site license.
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