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Technical digest of the 16th International Vacuum Microelectronics Conference. July 7-11, 2003, Senri Life Science Center, Toyonaka, Osaka, Japan / editors, Mikio Takai, Yasuhito Gotoh, Junzo Ishikawa.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Vacuum Microelectronics Conference (16th : 2003 : Osaka, Japan)
- Language:
- English
- Subjects (All):
- Microelectronics--Congresses.
- Microelectronics.
- Vacuum technology--Congresses.
- Vacuum technology.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xx, 314 pages : illustrations
- Other Title:
- IVMC 2003
- 16th International Vacuum Microelectronics Conference
- Vacuum Microelectronics Conference, 2003, Technical Digest of the 16th International.
- Place of Publication:
- [Piscataway, N.J.] : IEEE : Electron Devices Society ; [Place of publication not identified] : AVS Science & Technology, [2003]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE Catalogue Number 03TH8703"--T.p. verso.
- Includes bibliographical references and author index.
- ISBN:
- 4818195154
- 9784818195158
- OCLC:
- 53233542
- Access Restriction:
- Restricted for use by site license.
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