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2002 Semiconductor Manufacturing Technology Workshop. date: December 10-11, 2002, location: the Ambassador Hotel-Hsinchu, Taiwan / sponsored by Taiwan Semiconductor Industry Association (TSIA), IEEE Electron Devices Society Taipei Chapter ; co-sponsored by: the IEEE Electron Devices Society ... [and others].
- Format:
- Book
- Conference/Event
- Conference Name:
- Semiconductor Manufacturing Technology Workshop (2002 : Hsinchu, Taiwan)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Electronic industries--Congresses.
- Electronic industries.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xvii unnumbered pages, 310 pages : illustrations
- Other Title:
- Semiconductor Manufacturing Technology Workshop, 2002.
- Place of Publication:
- Hsinchu, Taiwan : Taiwan Semiconductor Industry Association ; Piscataway, N.J. : IEEE, [2002]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Cover title.
- "IEEE Catalog Number: 02EX613"--Cover.
- Includes bibliographical references.
- ISBN:
- 0780376048
- 9780780376045
- OCLC:
- 52055256
- Access Restriction:
- Restricted for use by site license.
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