2002 7th International Symposium on Plasma- and Process-Induced Damage. June 5-7, 2002, Maui, Hawaii, USA

MLA

Hook, Terence., et al. 2002 7th International Symposium on Plasma- and Process-Induced Damage. June 5-7, 2002, Maui, Hawaii, USA. Santa Clara, Calif. : AVS, [2002]

APA

Hook, T., Eriguchi, K., Gabriel, C., IEEE Xplore (Online service), American Vacuum Society., IEEE Electron Devices Society. & Ōyō Butsuri Gakkai. (2002). 2002 7th International Symposium on Plasma- and Process-Induced Damage. June 5-7, 2002, Maui, Hawaii, USA. Santa Clara, Calif. : AVS.

Chicago

Hook, Terence., Koji. Eriguchi, Calvin T. Gabriel, IEEE Xplore (Online service), American Vacuum Society., IEEE Electron Devices Society. and Ōyō Butsuri Gakkai. 2002 7th International Symposium on Plasma- and Process-Induced Damage. June 5-7, 2002, Maui, Hawaii, USA. Santa Clara, Calif. : AVS, [2002]