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MEMS 2003. IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003 / sponsored by IEEE and the Robotics and Automation Society.
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE International Conference on Micro Electro Mechanical Systems (16th : 2003 : Kyoto, Japan)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xxxiv, 711 pages : illustrations
- Other Title:
- Micro electro mechanical systems
- MEMS-03 Kyoto
- Place of Publication:
- Piscataway, N.J. : IEEE, [2003]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "MEMS-03 Kyoto."
- "IEEE Catalog Number: 03CH37426."
- Includes bibliographical references and indexes.
- ISBN:
- 0780377443
- 9780780377448
- OCLC:
- 52002957
- Access Restriction:
- Restricted for use by site license.
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