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2001 Microelectromechanical Systems Conference. MEMS 2001 : 24-26 August 2001, Berkeley, California, USA / technical co-sponsorship by IEEE Circuits and Systems Society.
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View online- Format:
- Book
- Conference/Event
- Conference Name:
- MEMS 2001 (2001 : Berkeley, Calif.)
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- vii, 116 pages : illustrations
- Place of Publication:
- New York City : IEEE, [2002]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Includes bibliographical references and index.
- ISBN:
- 0780372247
- 9780780372245
- OCLC:
- 49548445
- Access Restriction:
- Restricted for use by site license.
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