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Microprocesses and nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [and others].
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View online- Format:
- Book
- Conference/Event
- Conference Name:
- International Microprocesses and Nanotechnology Conference (14th : 2001 : Shimane-ken Japan)
- Language:
- English
- Subjects (All):
- Integrated circuits--Very large scale integration--Design and construction--Congresses.
- Integrated circuits.
- Integrated circuits--Very large scale integration--Design and construction.
- Lithography--Congresses.
- Lithography.
- Nanotechnology--Congresses.
- Nanotechnology.
- Microelectronics--Congresses.
- Microelectronics.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xxviii, 318 pages : illustrations
- Other Title:
- Microprocesses and Nanotechnology Conference, 2001 International.
- Place of Publication:
- Tokyo : Business Center for Academic Societies Japan, [2001]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "Micro Nano Conference."
- Chair, organizing committee, Yoshinobu Aoyagi.
- ISBN:
- 4891140178
- 9784891140175
- OCLC:
- 49271491
- Access Restriction:
- Restricted for use by site license.
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