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2001 IEEE International Symposium on Semiconductor Manufacturing conference proceedings. October 8-10, 2001, San Jose, California.
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- Book
- Conference/Event
- Conference Name:
- International Symposium on Semiconductor Manufacturing (2001 : San Jose, Calif.)
- Language:
- English
- Subjects (All):
- Electronic industries--Congresses.
- Electronic industries.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xi, 525 pages : illustrations
- Other Title:
- International Symposium on Semiconductor Manufacturing
- Also known as: ISSM 2001
- Semiconductor Manufacturing Symposium, 2001 IEEE International.
- Place of Publication:
- Piscataway, N.J. : Institute of Electrical and Electronics Engineers, [2001]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE catalog number 01CH37203"--T.p. verso.
- Includes bibliographical references and author index.
- ISBN:
- 0780367316
- 9780780367319
- 0780367324
- 9780780367326
- OCLC:
- 48193593
- Access Restriction:
- Restricted for use by site license.
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