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10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002. September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada / editors, J. Gelpey ... [and others] ; IEEE Electron Devices Society.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Conference on Advanced Thermal Processing of Semiconductors (10th : 2002 : Vancouver, B.C.)
- Language:
- English
- Subjects (All):
- Semiconductors--Heat treatment--Congresses.
- Semiconductors.
- Rapid thermal processing--Congresses.
- Rapid thermal processing.
- Semiconductor doping--Congresses.
- Semiconductor doping.
- Semiconductors--Defects--Congresses.
- Semiconductors--Defects.
- Semiconductors--Heat treatment.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- ix unnumbered pages, 241 pages : illustrations
- Other Title:
- Advanced thermal processing of semiconductors
- RTP 2002
- Place of Publication:
- Piscataway, N.J. : IEEE, [2002]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- "IEEE Catalog Number: 02EX574"--T.p. verso.
- Includes bibliographical references.
- ISBN:
- 0780374657
- 9780780374652
- OCLC:
- 50756432
- Access Restriction:
- Restricted for use by site license.
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