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ASMC 2001. the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by [IEEE] Electron Devices Society ... [and others].

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Format:
Book
Conference/Event
Contributor:
IEEE Xplore (Online service)
IEEE Electron Devices Society.
Semiconductor Equipment and Materials International.
Conference Name:
IEEE/SEMI Advanced Semiconductor Manufacturing Conference (12th : 2001 : Munich, Germany)
Language:
English
Subjects (All):
Semiconductor industry--Congresses.
Semiconductor industry.
Semiconductors--Design and construction--Congresses.
Semiconductors.
Semiconductors--Design and construction.
Process control--Congresses.
Process control.
Genre:
Conference papers and proceedings.
Physical Description:
xi unnumbered pages, 244 pages : illustrations
Other Title:
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Advancing the science of semiconductor manufacturing excellence
Advanced Semiconductor Manufacturing Conference and Workshop
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.
Place of Publication:
Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, [2001]
System Details:
Mode of access: World Wide Web.
text file
Notes:
Cover title.
"IEEE Catalog Number 01CH37150"--Cover.
Includes bibliographical references.
ISBN:
0780365550
9780780365551
0780365569
9780780365568
OCLC:
48083177
Access Restriction:
Restricted for use by site license.

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