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ASMC 2001. the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by [IEEE] Electron Devices Society ... [and others].
- Format:
- Book
- Conference/Event
- Conference Name:
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference (12th : 2001 : Munich, Germany)
- Language:
- English
- Subjects (All):
- Semiconductor industry--Congresses.
- Semiconductor industry.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Semiconductors--Design and construction.
- Process control--Congresses.
- Process control.
- Genre:
- Conference papers and proceedings.
- Physical Description:
- xi unnumbered pages, 244 pages : illustrations
- Other Title:
- 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
- Advancing the science of semiconductor manufacturing excellence
- Advanced Semiconductor Manufacturing Conference and Workshop
- Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.
- Place of Publication:
- Piscataway, N.J. : IEEE ; San Jose, Calif. : SEMI, [2001]
- System Details:
- Mode of access: World Wide Web.
- text file
- Notes:
- Cover title.
- "IEEE Catalog Number 01CH37150"--Cover.
- Includes bibliographical references.
- ISBN:
- 0780365550
- 9780780365551
- 0780365569
- 9780780365568
- OCLC:
- 48083177
- Access Restriction:
- Restricted for use by site license.
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