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Microprocesses and Nanotechnology 2000. digest of papers : 2000 International Microprocesses and Nanotechnology Conference : July 11-13, 2000, Tokyo, Japan / sponsored by the Japan Society of Applied Physics ... [and others].

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IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online

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Format:
Book
Conference/Event
Contributor:
IEEE Xplore (Online service)
Horiike, Yasuhiro.
Conference Name:
International Microprocesses and Nanotechnology Conference (2000 : Tokyo, Japan)
Language:
English
Subjects (All):
Microfabrication--Congresses.
Microfabrication.
Nanotechnology--Congresses.
Nanotechnology.
Genre:
Conference papers and proceedings.
Physical Description:
xxiii, 306 pages : illustrations
Place of Publication:
Tokyo, Japan : Business Center for Academic Societies Japan, [2000]
System Details:
Mode of access: World Wide Web.
text file
Notes:
"IEEE Catalog No. 00EX387 ; JSAP Cat. No. 001225"--T.p. verso.
Includes bibliographical references and author index.
ISBN:
4891140046
9784891140045
OCLC:
45465359
Access Restriction:
Restricted for use by site license.

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